Inductively coupled transformer with tunable impedance match network

ABSTRACT

A packaged RF power transistor includes an RF input lead, a DC gate bias lead, an RF power transistor comprising gate, source and drain terminals, and an input match network. The input match network includes a primary inductor electrically connected to the RF input lead, a secondary inductor electrically connected to the gate terminal and to the DC gate bias lead, and a tuning capacitor electrically connected to the RF input lead and physically disconnected from the gate terminal. The input match network is configured to block DC voltages between the RF input lead and the gate terminal and to propagate AC voltages in a defined frequency range from the RF input lead to the gate terminal. The tuning capacitor is configured to adjust a capacitance of the input match network based upon a variation in DC voltage applied to the RF input lead.

TECHNICAL FIELD

The instant application relates to RF power transistors, and moreparticularly to input matching for RF power transistors.

BACKGROUND

High power RF transistors such as LDMOS (laterally diffused metal oxidesemiconductor) transistors have input and output impedancessignificantly lower than 50 ohms (high Q impedance), yet the functioningRF circuit has to be matched to 50 ohms. To facilitate the impedancematch to 50 ohms, the RF transistor is typically designed with a matchcircuit on the input and output of the transistor that is integratedinto the packaged transistor. The match network helps reduce the Q ofthe packaged transistor, making it easier to match to 50 ohms. Typicallythe improvement in impedance can only be achieved in a narrow frequencyrange. In addition, the match network helps to shape the frequencyresponse of the transistor and amplifier such that there is high gain atthe desired operating frequency, and the gain is suppressed outside thatfrequency range.

Known techniques for packaging high power RF transistors includingproviding a low-pass L-C-L network to match the input of the RFtransistor. This low-pass L-C-L network matches the input impedance ofthe transistor to a lower Q over a specific frequency range. Thislow-pass L-C-L network includes discrete components and electricalconnectors. Typically, the low-pass L-C-L network is designed assuming anominal reactance value that is tailored to a specific frequency range.This nominal reactance value assumes nominal component values (i.e.,capacitance, inductance, and resistance) of the discrete components andelectrical connectors. However, actual component values may deviate fromthe nominal component values due to factors such as process variation.In fact, minor variations to the component values, such as an increasein capacitance of +/−5, percent may have a substantial impact on theperformance of the input impedance network. In many applications, thisdeviation may be significant enough such that the part is not withinspecifications and must be discarded. Further, this deviation can leadto lower efficiency and power output of the device. One known techniqueto address this issue is to test the device during manufacturing and tosubsequently perform corrective measures that compensate for deviationsfrom the nominal values. However, these techniques add additional costand complexity and are ill-equipped to compensate for every possibledeviation from the nominal values.

SUMMARY

According to an embodiment, a packaged RF power transistor is disclosed.The packaged RF power transistor includes an RF input lead, a DC gatebias lead, an RF power transistor having gate, source and drainterminals, and an input match network. The input match network includesa primary inductor electrically connected to the RF input lead, asecondary inductor electrically connected to the gate terminal and tothe DC gate bias lead, and a tuning capacitor electrically connected tothe RF input lead and physically disconnected from the gate terminal.The input match network is configured to block DC voltages between theRF input lead and the gate terminal and to propagate AC voltages in adefined frequency range from the RF input lead to the gate terminal. Thetuning capacitor is configured to adjust a capacitance of the inputmatch network based upon a variation in DC voltage applied to the RFinput lead.

According to another embodiment, a packaged RF power transistor isdisclosed. The packaged RF power transistor has an RF input lead, a DCgate bias lead, an RF power transistor having gate, source and drainterminals, and an input match network. The input match network includesa primary inductor electrically connected to the RF input lead, asecondary inductor electrically connected to the gate terminal and tothe DC gate bias lead, and a tuning capacitor electrically connected tothe RF input lead and physically disconnected from the gate terminal.Nominal component values of the RF power transistor and the input matchnetwork are optimized such that a maximum gain is realized at a centerfrequency of the defined frequency range. Actual component values of theRF power transistor and the input match network deviate from the nominalcomponent values by a percentage. A capacitance value of the tuningcapacitor is adjustable based upon a variation in DC voltage applied tothe RF input lead so as to compensate for the deviation between thenominal component values and the actual component values.

According to another embodiment, a method of packaging an RF powertransistor is disclosed. The method includes providing a packaged RFpower transistor, having an RF input lead, a DC gate bias lead, an RFpower transistor comprising gate, source and drain terminals, and aninput match network. The input match network includes a transformercoupled between the RF input lead and the gate terminal configured toblock DC voltages between the RF input lead and the gate terminal and topropagate AC voltages in a defined frequency range from the RF inputlead to the gate terminal, and a tuning capacitor electrically connectedto the RF input lead and physically disconnected from the gate terminal.The method further includes testing the packaged RF power transistor fora deviation between nominal component values of the RF power transistorand the input match network and actual component values of the RF powertransistor and the input match network. The method further includesdetermining a DC bias to be applied to the tuning capacitor via the RFinput lead that compensates for the deviation between nominal componentvalues and actual component values.

BRIEF DESCRIPTION OF THE DRAWINGS

The elements of the drawings are not necessarily to scale relative toeach other. Like reference numerals designate corresponding similarparts. The features of the various illustrated embodiments can becombined unless they exclude each other. Embodiments are depicted in thedrawings and are detailed in the description which follows.

FIG. 1 illustrates an electrical schematic of a packaged RF powertransistor, according to an embodiment.

FIG. 2 illustrates a physical configuration of a packaged RF powertransistor, according to an embodiment.

FIG. 3 illustrates an electrical schematic of a packaged RF powertransistor, according to another embodiment.

FIG. 4 illustrates an electrical schematic of a packaged RF powertransistor, according to another embodiment.

FIG. 5 illustrates a physical configuration of a packaged RF powertransistor, according to an embodiment.

FIG. 6 illustrates a frequency response of a packaged RF powertransistor with nominal component values, according to an embodiment.

FIG. 7 illustrates a frequency response of a packaged RF powertransistor with actual component values before and after compensation,according to an embodiment.

DETAILED DESCRIPTION

According to embodiments described herein, an RF power transistor 100 ispackaged with an input match network 102 that includes a transformer 104between an RF input lead and a gate 106 of the RF power transistor 100.The transformer 104 includes primary and secondary inductors 108, 110that are inductively coupled but physically disconnected from oneanother. Thus, the transformer 104 blocks DC voltages between the RFinput lead and the gate terminal 106 and propagates AC voltages in adefined frequency range from the RF input lead to the gate terminal 106.

The input match network 102 includes a tuning capacitor 112 that iselectrically connected to the RF input lead and is physicallydisconnected from the gate terminal 106. That is, the tuning capacitor112 is on the primary side of the transformer 104. A capacitance valueof the tuning capacitor 112 can be adjusted by varying a DC bias appliedto the RF input lead. Consequently, the tuning capacitor 112 can be usedto adjust the capacitance of the input match network 102, which in turncan be used to adjust the electrical characteristics of the packageddevice 101. Examples of these electrical characteristics include forwardvoltage gain (S21), input port voltage reflection coefficient (S11) andthird order intermodulation (IM3).

The RF power transistor 100 and the tuning capacitor 112 operate indifferent DC ranges. For example, an RF power transistor 100 that issuitable for power amplification may operate at a DC voltage of 3 volts.By contrast, the tuning capacitor 112 may be operated at voltages ofbetween 10 and 30 volts. These higher DC voltages can potentially damagethe RF power transistor 100. Advantageously, because the tuningcapacitor 112 is on the primary side of the transformer 104, there is nodirect electrical connection between the tuning capacitor 112 and thegate 106 of the RF power transistor 100. Thus, the DC voltage that isprovided to the tuning capacitor 112 is isolated from the gate 106 ofthe RF power transistor 100. Meanwhile, an AC signal can propagateacross the input match network 102 from the RF input lead to the gate106 of the RF power transistor 100.

Referring to FIG. 1, an electrical schematic of a packaged device 101 isdepicted. The packaged device 101 includes two input terminals: an RFinput lead and a DC gate bias lead. The RF input lead is electricallycoupled to a gate terminal 106 of the RF power transistor 100 by aninput match network 102. The DC gate bias lead is electrically connectedto the gate terminal 106 of the RF power transistor 100 by the inputmatch network 102. Additionally, the packaged device 101 includes anoutput terminal that is coupled to a drain terminal of the RF powertransistor 100. According to an embodiment, a source terminal of the RFpower transistor 100 is electrically connected to ground.

The input match network 102 is nominally configured to provide impedancematching for the RF power transistor 100 at a defined frequency range,which includes a center frequency at which gain of the device ismaximized. According to an embodiment, the input match network 102includes a primary inductor 108 electrically connected to the RF inputlead and a secondary inductor 110 electrically connected to the gateterminal 106 and to the DC gate bias lead. The primary and secondaryinductors 108, 110 are inductively coupled to one another in atransformer configuration. That is, there is no physical connectionbetween the primary and secondary inductors 108, 110. However, theprimary and secondary inductors 108, 110 are in close proximity to oneanother such that a magnetic field generated by one induces a current inthe other, and vice-versa. A more detailed explanation of an input matchnetwork 102 having a transformer configuration is provided in U.S.patent application Ser. No. 14/069,867 to Marbell, the content of whichis incorporated by reference in its entirety. Due to the transformerconfiguration of the primary and secondary inductors 108, 110, thetransformer 104 blocks DC voltages and certain low frequency AC signalsfrom propagating from the RF input lead to the gate terminal 106 andallows higher frequency AC voltages in a defined frequency range topropagate from the RF input lead to the gate terminal 106. For example,the transformer 104 may block signals with a frequency of less than 100megahertz (MHz) while passing AC signals in the range of 1.9-2.1gigahertz (GHz).

The input match network 102 further includes a tuning capacitor 112electrically connected to the RF input lead. The tuning capacitor 112 isa variable capacitor (i.e., a “varactor” or “varicap”) having acapacitance value that is adjustable, based upon a DC signal that isapplied to one of the terminals of the tuning capacitor 112, with theother terminal being connected to ground. The electrical connectionbetween the tuning capacitor 112 and the RF input lead may be providedby a conductive bond wire, which is intrinsically inductive. The tuningcapacitor 112 is electrically connected to the primary inductor and isphysically disconnected from the gate terminal 106 of the RF powertransistor 100. That is, there are no electrically conductive structuresthat provide a single node at which the DC voltage across the tuningcapacitor 112 is always identical the DC voltage at the gate terminal106. Thus, a DC voltage that is applied to the RF input lead and presentat the ungrounded terminal of the tuning capacitor 112 is blocked fromthe gate terminal 106. However, any AC component of a signal that isapplied to the RF input lead and present at the ungrounded terminal ofthe tuning capacitor 112 will pass to the gate terminal 106 via theinductive coupling the primary and secondary inductors 108, 110 in thetransformer 104.

The tuning capacitor 112 is configured to adjust a capacitance of theinput match network 102 based upon a variation in DC voltage applied tothe RF input lead. For example, the tuning capacitor 112 can have acapacitance of 28 picofarads (pF) at a DC bias of 28 volts (V) and acapacitance of 34 picofarads (pF) at a DC bias of 15 volts.Consequently, the frequency response of the input match network 102 isadjustable.

The input match network 102 includes first and second primary sidecapacitors 114, 116. The primary side capacitors 114, 116 areelectrically connected to the primary inductor 108. Further, the primaryside capacitors 114, 116 are physically disconnected from the secondaryinductor 110 as well as the gate terminal 106 of the RF transistor. Inthe embodiment of FIG. 1, the first primary side capacitor 114 isconfigured as a variable capacitor and provides the tuning capacitor 112of the input match network 102. The input match network 102 additionallyincludes first and second secondary side capacitors 118, 120. Thesecondary side capacitors 118, 120 are electrically connected to thesecondary inductor 110. Further, the secondary side capacitors 118, 120are physically disconnected from the primary inductor 108 as well as theRF input lead.

According to an embodiment, the tuning capacitor 112 is configured tooperate at a DC bias of between 0 and 40 volts. In this operating range,the tuning capacitor 112 provides the C-V characteristics of acapacitor. Further, the RF power transistor 100 is configured to operateat a DC bias of between 0 and 4 volts. In this operating range, the RFpower transistor 100 provides the I-V characteristics of a transistor.Outside of these operating ranges, these devices are susceptible tofailure and do not necessarily provide the I-V characteristics of acapacitor or transistor. For example, at gate voltages of 10 volts theRF power transistor 100 is susceptible to failure due to various highelectric field phenomena, such as avalanche breakdown and dielectricbreakdown. Advantageously, the transformer configuration of the inputmatch network 102 allows the tuning capacitor 112 to be operated at thefull range of 0 to 40 volts without voltages that damage the RF powertransistor 100 (i.e., 4 to 40 volts) being applied to the RF powertransistor 100.

FIG. 2 depicts a structural configuration of the packaged device 101,according to one embodiment. FIG. 2A depicts a top down view of thepackaged device 101, FIG. 2B depicts a diagonal view of the packageddevice 101, and FIG. 2C depicts a close up view of bond wires and asegmented capacitor array 124 in the packaged device 101.

The package of the packaged device 101 includes an electricallyconductive substrate 122 that provides a ground terminal for thepackaged device 101. Each of the components that are mounted on thepackage has a surface terminal that can be grounded via an electricalconnection to the substrate 122. For example, the RF power transistor100 is a so-called source-down configuration such that the sourceterminal of the device is grounded by a connection to the substrate 122.

As shown in FIG. 2, the input match network 102 includes first andsecond segmented capacitor arrays 124, 126 arranged between the RF inputlead and the RF power transistor 100. According to an embodiment, thefirst and second segmented capacitor arrays 124, 126 are semiconductordevices. The first and second segmented capacitor arrays 124, 126include a plurality of discrete capacitors arranged next to one anotherin a lengthwise string. That is, the first and second segmentedcapacitor arrays 124, 126 are configured in a unit cell format such thata desired capacitance can be provided by connecting a number of thediscrete capacitors together. Consequently, the length of the first andsecond segmented capacitor arrays 124, 126 determines how many discretecapacitors are available for connection, and therefore determines amaximum capacitance of a capacitor that is formed from either one of thefirst and second segmented capacitor arrays 124, 126.

The input match network 102 of the packaged device 101 includes firstand second sets of bond wires 128, 130. The first and second sets ofbond wires 128, 130 are provided by a plurality of individual bond wiresthat are adjacent to one another in a parallel configuration. The firstset of bond wires 128 is electrically connected to the RF input lead andto the first and second segmented capacitor arrays 124, 126. However,the first set of bond wires 128 is physically disconnected from the gateterminal 106 of the RF power transistor 100. The second set of bondwires 130 is electrically connected to the gate terminal 106 and to thefirst and second segmented capacitor arrays 124, 126. However, thesecond set of bond wires 130 is physically disconnected from the RFinput lead.

The transformer 104 of the input match network 102 is formed by sectionsof the first and second sets of bond wires 128, 130 that areinterdigitated with one another. More particularly, the primary inductor108 is formed by sections of the first set of bond wires 128 extendingbetween the first and second segmented capacitor arrays 124, 126 and thesecondary inductor 110 is formed by sections of the second set of bondwires 130 extending between the first and second segmented capacitorarrays 124, 126. The coupling coefficient of the transformer 104 isdetermined by a variety of physical parameters of the sections of bondwires, such as height of the wires, separation distance between the bondwires, length of the sections, etc.

According to the embodiment of FIG. 2, the first segmented capacitorarray 124 includes a plurality of variable capacitors alternating with aplurality of static capacitors. The first set of bond wires 128 iselectrically connected to the variable capacitors in the first segmentedcapacitor array 124 to form the first primary side capacitor 114, asrepresented in FIG. 1. Thus, the tuning capacitor 112 of the input matchnetwork 102 is formed from the variable capacitors in the firstsegmented capacitor array 124. Additionally, the second set of bondwires 130 is electrically connected to the static capacitors in thefirst segmented capacitor array 124 to form the first secondary sidecapacitor, 118 as represented in FIG. 1.

According to an embodiment, the second segmented capacitor 126 array isexclusively formed from static capacitors. The first set of bond wires128 is electrically connected to the static capacitors in the secondsegmented capacitor 126 array to form the second primary side capacitor116, as represented in FIG. 1. Additionally, the second set of bondwires 130 is electrically connected to the static capacitors in thesecond segmented capacitor 126 array to form the second secondary sidecapacitor 120, as represented in FIG. 1.

FIG. 3 depicts an electrical schematic of a packaged device 101,according to another embodiment. The circuit of FIG. 3 is configuredidentically to the circuit of FIG. 1, with the exception that the secondprimary side capacitor 116 is not a static capacitor. Instead, thesecond primary side capacitor 116 is configured as a variable capacitor.Thus, the input match network 102 includes two tuning capacitors 112.Collectively, the tuning capacitors 112 can be used to adjust thereactance of the input match network 102 using a DC signal and thereforecompensate for component variations in the manner previously discussed.Because both of the tuning capacitors 112 are connected on the primaryside of the transformer 104 and are directly connected to the RF inputlead via the first set of bond wires 128, a DC signal applied to the RFinput lead propagates to both of the tuning capacitors 112. Thus, thecircuit of FIG. 3 has a wide range of adjustable capacitance values forthe input match network 102 without presenting damaging DC voltages tothe gate terminal 106 of the RF power transistor 100.

The packaged device 101 of FIG. 3 can have the structural configurationdepicted in FIG. 2. The two tuning capacitors 112 can be provided byconfiguring both the first and second segmented capacitor arrays 124,126 with a plurality of variable capacitors alternating with a pluralityof static capacitors. That is, the second segmented capacitor array 126can be configured identically to the first capacitor segmented capacitorarray 124 described with reference to FIG. 2. In this configuration, thefirst set of bond wires 128 is electrically connected to the variablecapacitors in both the first and second segmented capacitor arrays 124,126. The second set of bond wires 130 is electrically connected to thestatic capacitors in both the first and second segmented capacitorarrays 124, 126.

FIG. 4 depicts an electrical schematic of a packaged device 101,according to another embodiment. In the embodiment of FIG. 4, the tuningcapacitor 112 is separate from the first and second primary sidecapacitors 114, 116. In this configuration, the first and second primaryside capacitors 114, 116 are static capacitors. The tuning capacitor 112is electrically connected to the RF input lead and is on the primaryside of the transformer 104 such that a DC voltage applied to the RFinput lead is present at the tuning capacitor 112 but not the gateterminal 106 of the RF power transistor 100.

FIG. 5 depicts a structural configuration of the packaged device 101that is schematically represented in FIG. 4. FIG. 5A depicts a top downview of the packaged device 101 and FIG. 5B depicts a diagonal view ofthe packaged device 101. In contrast to the configuration of FIG. 3, thepackaged device 101 of FIG. 5 includes a third capacitor block 132. Thethird capacitor block 132 is arranged between the RF input lead and thefirst segmented capacitor array 124. The first set of bond wires 128 iselectrically connected to the third capacitor block 132 as well as thefirst and second segmented capacitor 126 arrays 124, 126. The thirdcapacitor block 132 is configured as a variable capacitor. Thus, thetuning capacitor 112 is formed from the variable capacitor of the thirdcapacitor block 132. Further, in this configuration, the first andsecond segmented capacitor arrays 124, 126 may be formed with each ofthe capacitors being static capacitors.

The compensation effect of the tuning capacitor 112 will now bediscussed. The packaged device 101 described herein is designed andmanufactured according to nominal component values. A nominal componentvalue is a theoretical electrical parameter that is an ideal goal of themanufacturing process. By contrast, an actual component value is anelectrical parameter that is actually realized by the manufacturingprocess, and may deviate from the nominal component value. Thus, theprocess window of a particular manufacturing process describes theprobability of that an actual component value (or component values) willdeviate from the nominal component value (or component values). Examplesof such component values that probabilistically deviate from nominalvalues include, but are not limited to: input capacitance of the RFpower transistor 100, output capacitance of the RF power transistor 100,capacitance of the static capacitors in the input match network 102, andinductance of the bond wires in the input match network 102. Thesedeviations occur for a variety of reasons. For example, the processingtechniques that are used to form the first and second set of bond wires128, 130 may be difficult to completely control. Accordingly, theheights of the bond wires 128, 130 are susceptible to deviation. Thesedeviations cause the inductances of the bond wires 128, 130 to vary.Additionally, the semiconductor process that are used to form the firstand second segmented capacitor 126 arrays 124, 126 and the RF powertransistor 100 may be susceptible to variation. Consequently, thecapacitance of the primary side capacitors 114, 116 the secondary sidecapacitors 118, 120 and the RF power transistor 100 can vary.

Referring to FIG. 6, an exemplary nominal response of the packageddevice 101 is shown. The graphs of FIG. 6 assume an input match network102 and a PCB matching network that together transforms the inputimpedance of RF power transistor 100 to a 50 ohm load. The nominalcomponent values of the RF power transistor 100 and the input matchnetwork 102 are optimized such that a maximum gain is realized at acenter frequency of 2.00 GHz within a defined frequency range 1.97-2.03GHz. Outside of this defined frequency range, the gain and efficiency ofthe packaged device 101 is reduced.

FIG. 6A depicts a nominal forward voltage gain (S21) of the RF packagedpower transistor and a nominal input port voltage reflection coefficient(S11), according to an embodiment. FIG. 6B depicts a nominal insertionphase shift, i.e., delay, (S21) of the RF packaged power transistor.

Referring to FIG. 7, which includes FIGS. 7A and 7B, exemplary actualparameters of the packaged device 101 are shown before and aftercompensation are shown. The actual component values of the RF powertransistor 100 and the input match network 102 may deviate from thenominal characteristics by any of a variety of percentages, such as+/−1%, +/−5%, +/−10%, etc. In the example of FIG. 7, an actual inputcapacitance of the RF power transistor 100 is 5 percent higher than thenominal value and an inductance of a gate wire section 134 connectingthe gate 106 of the RF power transistor 100 to the transformer 104 is 5percent higher than nominal. Lines 200, 202, 204 depict the impact onthe electrical parameters of the packaged device 101 due to thesedeviations. Lines 206, 208, 210 depict the impact on the electricalparameters of the packaged device 101 after a capacitance of the tuningcapacitor 112 has been adjusted by a DC voltage applied to the RF inputlead.

Referring to FIG. 7A, line 200 depicts the actual forward voltage gain(S21) of the RF packaged power transistor and line 202 depicts theactual nominal input port voltage reflection coefficient (S11) with thetuning capacitor 112 having a capacitance of 35 pF. As can be seen,these parameters are skewed due to the deviation in component valuessuch that they are not perfectly symmetrical with respect to the centerfrequency of 2.00 GHz. This skewing may be unacceptable for a givenapplication such that, in the absence of corrective measures, the partmust be discarded. However, this skewing is effectively abrogated by avariation to the capacitance of the tuning capacitor 112. Line 206depicts the actual forward voltage gain (S21) of the RF packaged powertransistor and line 208 depicts the actual input port voltage reflectioncoefficient (S11) with the tuning capacitor 112 being adjusted downwardto a capacitance of 32.7 pF. This adjustment can be made byappropriately biasing the RF Input Lead in the manner previouslydiscussed. As can be seen, the adjustment to the capacitance of thetuning capacitor 112 fully compensates for the deviation between nominaland actual parameter values. Thus, the electrical characteristics of thepackaged device 101 can be brought close to or exactly in conformitywith a nominal forward voltage gain (S21) and a nominal input portvoltage reflection coefficient (S11) depicted in FIG. 6A.

Referring to FIG. 7B, line 204 depicts the actual the insertion phaseshift, i.e., delay, (S21) of the packaged device 101 with the tuningcapacitor 112 having a capacitance of 35 pF. As can be seen, thedeviation in component values results in approximately 11 degrees inphase shift between nominal and actual for the packaged device 101. Thisshift may be unacceptable for a given application such that, in theabsence of corrective measures, the part must be discarded. Line 210depicts the actual the insertion phase shift, i.e., delay, (S21) of thepackaged device 101 after the capacitance of the tuning capacitor 112has been adjusted to 32.7 pF in the manner discussed herein (i.e., byadjustment to a DC voltage at the RF input lead). As can be seen, thisadjustment to the capacitance of the tuning capacitor 112 fullycompensates for the deviation between nominal and actual parametervalues. Accordingly, by adjusting the DC voltage at the RF input lead,the RF packaged power transistor can be brought close to or exactly inconformity with the nominal insertion phase shift, i.e., delay, (S21) ofthe packaged device 101.

FIGS. 6-7 represent one exemplary configuration of a packaged device 101that is optimized to a particular frequency, but the compensationprinciple may be applied to any of a variety of component values.Further, the compensation principle may be applied to different packageconfigurations, provided that the package includes a transformer thatthat isolates the tuning capacitor 112 in the manner described herein.For example, the packaged device 101 may include an output match circuitthat is substantially similar or identical to the output match circuitdescribed with reference to FIG. 9 of U.S. patent application Ser. No.14/069,867 to Marbell.

A method of providing a packaged device 101 will now be discussed.According to an embodiment, the method includes providing a packageddevice 101 according to any one of the embodiments described herein.Subsequently, the device is tested to detect a deviation between nominalcomponent values of the RF power transistor 100 and the input matchnetwork 102 and actual component values of the RF power transistor 100and the input match network 102. This testing process may be performedby testing the components individually. For example, the testing processmay include measuring at least one of: an input capacitance of the RFpower transistor 100, an output capacitance of the RF power transistor100, a capacitance at least one of the static capacitors in the inputmatch network 102, and an inductance of at least one of the bond wiresin the input match network 102. Alternatively, the testing process maybe performed on the input/output terminals of the packaged device 101.For example, the testing process may include measuring at least one of:an insertion phase shift of the packaged device 101, an actual forwardvoltage gain of the packaged device 101, and an input port voltagereflection coefficient.

After testing, a DC bias to be applied to the tuning capacitor 112 viathe RF input lead that compensates for the deviation between nominalcomponent values and actual component values is determined. Thisdetermination may be done experimentally (i.e., by adjusting the DC biasand measuring the response in the packaged device 101) or theoretically(i.e., by calculating an appropriate capacitance of the tuning).

Advantageously, the method disclosed herein allows for the production ofa packaged device 101 at increased yield and lower expense. Because thetuning capacitor 112 is fabricated as part of the device, e.g., usingsegmented capacitor arrays, the time and expense required to compensatefor deviations between nominal and actual values is extremely low incomparison to conventional techniques. Examples of conventionaltechniques for compensating for deviations between nominal and actualcomponent values include: adjustment to bond wire loops heights aftertesting; and selecting components (i.e., transistors and capacitors)from nearby locations of the same wafer, which are more likely to beconsistent with one another, to use in a single package. Both of thesetechniques are not completely effective and add expense and delay to theprocess. Advantageously, the method described herein eliminates the needto apply these conventional techniques because the device can becompensated simply and effectively using a DC voltage. The circuitrythat drives the packaged device 101 can be designed according tocommonly known techniques such that the DC voltage applied to the RFinput lead is programmable and adjustable.

The term “electrically connected” describes a permanent low-ohmicconnection between electrically connected elements, for example a directcontact between the concerned elements or a low-ohmic connection via ametal and/or highly doped semiconductor. The term “electrically coupled”includes that one or more intervening element(s) adapted for signaltransmission may be provided between the electrically coupled elements,for example transformers and/or transistors. An electrical connectionbetween two elements forms a node that, notwithstanding parasiticeffects, remains at a constant AC and DC voltage. By contrast, when twoelements are electrically coupled to one another, an AC or DC voltagemay vary across the electrical coupling.

Spatially relative terms such as “under,” “below,” “lower,” “over,”“upper” and the like, are used for ease of description to explain thepositioning of one element relative to a second element. These terms areintended to encompass different orientations of the device in additionto different orientations than those depicted in the figures. Further,terms such as “first”, “second”, and the like, are also used to describevarious elements, regions, sections, etc. and are also not intended tobe limiting. Like terms refer to like elements throughout thedescription.

As used herein, the terms “having,” “containing,” “including,”“comprising” and the like are open-ended terms that indicate thepresence of stated elements or features, but do not preclude additionalelements or features. The articles “a,” “an” and “the” are intended toinclude the plural as well as the singular, unless the context clearlyindicates otherwise.

With the above range of variations and applications in mind, it shouldbe understood that the present invention is not limited by the foregoingdescription, nor is it limited by the accompanying drawings. Instead,the present invention is limited only by the following claims and theirlegal equivalents.

What is claimed is:
 1. A packaged RF power transistor, comprising: an RFinput lead; a DC gate bias lead; an RF power transistor comprising gate,source and drain terminals; and an input match network, comprising: aprimary inductor electrically connected to the RF input lead; asecondary inductor electrically connected to the gate terminal and tothe DC gate bias lead; a tuning capacitor electrically connected to theRF input lead and physically disconnected from the gate terminal; firstand second segmented capacitor arrays arranged between the RF input leadand the RF power transistor; a first set of bond wires electricallyconnected to the RF input lead and to the first and second segmentedcapacitor arrays; and a second set of bond wires electrically connectedto the gate terminal and to the first and second segmented capacitorarrays; wherein the input match network is configured to block DCvoltages between the RF input lead and the gate terminal and topropagate AC voltages in a defined frequency range from the RF inputlead to the gate terminal, wherein the tuning capacitor is configured toadjust a capacitance of the input match network based upon a variationin DC voltage applied to the RF input lead, wherein the primary inductoris formed by sections of the first set of bond wires extending betweenthe first and second segmented capacitor arrays, and wherein thesecondary inductor is formed by sections of the second set of bond wiresextending between the first and second segmented capacitor arrays. 2.The packaged RF power transistor of claim 1, wherein the primary andsecondary inductors are inductively coupled to one another in atransformer configuration, the transformer being configured to block theDC voltages and to propagate the AC voltages, and wherein the tuningcapacitor is electrically connected to the primary inductor.
 3. Thepackaged RF power transistor of claim 1, wherein the first segmentedcapacitor array comprises a plurality of variable capacitors alternatingwith a plurality of static capacitors, wherein the first set of bondwires is electrically connected to the variable capacitors in the firstsegmented capacitor array, wherein the second set of bond wires iselectrically connected to the static capacitors in the first segmentedcapacitor array, and wherein the tuning capacitor is formed from thevariable capacitors in the first segmented capacitor array.
 4. Thepackaged RF power transistor of claim 3, wherein the second segmentedcapacitor array comprises a plurality of variable capacitors alternatingwith a plurality of static capacitors, wherein the first set of bondwires is electrically connected to the variable capacitors in the secondsegmented capacitor array, wherein the second set of bond wires iselectrically connected to the static capacitors in the second segmentedcapacitor array, and further comprising a second tuning capacitor thatis formed from the variable capacitors in the first and second segmentedcapacitor arrays.
 5. The packaged RF power transistor of claim 1,wherein the input match network further comprises a third capacitorblock arranged between the RF input lead and the RF power transistor andcomprising a variable capacitor, wherein the first set of bond wires iselectrically connected to the third capacitor block, and wherein thetuning capacitor comprises the variable capacitor of the third capacitorblock.
 6. The packaged RF power transistor of claim 5, wherein each ofthe capacitors in the first and second segmented arrays of capacitorsare static capacitors.
 7. A packaged RF power transistor of claim 1,wherein the tuning capacitor is configured to operate at a DC bias ofbetween 0 and 40 volts, and wherein the RF power transistor isconfigured to operate at a DC bias of between 0 and 4 volts.
 8. Apackaged RF power transistor, comprising: an RF input lead; a DC gatebias lead; an RF power transistor comprising gate, source and drainterminals; and an input match network, comprising: a primary inductorelectrically connected to the RF input lead; a secondary inductorelectrically connected to the gate terminal and to the DC gate biaslead; and a tuning capacitor electrically connected to the RF input leadand physically disconnected from the gate terminal; first and secondsegmented capacitor arrays arranged between the RF input lead and the RFpower transistor; a first set of bond wires electrically connected tothe RF input lead and to the first and second segmented capacitorarrays; and a second set of bond wires electrically connected to thegate terminal and to the first and second segmented capacitor arrays;wherein nominal component values of the RF power transistor and theinput match network are optimized such that a maximum gain is realizedat a center frequency of the defined frequency range, wherein actualcomponent values of the RF power transistor and the input match networkdeviate from the nominal component values by a percentage, wherein acapacitance value of the tuning capacitor is adjustable based upon avariation in DC voltage applied to the RF input lead so as to compensatefor the deviation between the nominal component values and the actualcomponent values, wherein the primary inductor is formed by sections ofthe first set of bond wires extending between the first and secondsegmented capacitor arrays, and wherein the secondary inductor is formedby sections of the second set of bond wires extending between the firstand second segmented capacitor arrays.
 9. The packaged RF powertransistor of claim 8, wherein the nominal component values of the RFpower transistor and the input match network comprise at least one of:input capacitance of the RF power transistor, output capacitance of theRF power transistor, a capacitance of static capacitors in the inputmatch network, and an inductance of bond wires in the input matchnetwork, and wherein the actual component values deviate from thenominal component values by +/−5 percent.
 10. The packaged RF powertransistor of claim 9, wherein the actual input capacitance of the RFpower transistor is 5 percent higher than the nominal component value,wherein the inductance of one of the bond wires in the input matchnetwork is 5 percent higher than the nominal component value, whereinthe deviation of the actual component values from the nominal componentvalues shifts an insertion phase of the packaged RF power transistor by11 percent, and wherein a capacitance value of the tuning capacitor isadjustable to completely compensate for the shift in the insertionphase.
 11. A method of packaging an RF power transistor, the methodcomprising: providing a packaged RF power transistor, comprising an RFinput lead, a DC gate bias lead, an RF power transistor comprising gate,source and drain terminals, and an input match network, comprising: atransformer coupled between the RF input lead and the gate terminalconfigured to block DC voltages between the RF input lead and the gateterminal and to propagate AC voltages in a defined frequency range fromthe RF input lead to the gate terminal; a tuning capacitor electricallyconnected to the RE Input lead and physically disconnected from the gateterminal; first and second segmented capacitor arrays arranged betweenthe RF input lead and the RF power transistor; a first set of bond wireselectrically connected to the RF input lead and to the first and secondsegmented capacitor arrays; and a second set of bond wires electricallyconnected to the gate terminal and to the first and second segmentedcapacitor arrays, testing the packaged RF power transistor for adeviation between nominal component values of the RF power transistorand the input match network and actual component values of the RF powertransistor and the input match network; and determining a DC bias to beapplied to the tuning capacitor via the RF input lead that compensatesfor the deviation between nominal component values and actual componentvalues, wherein the primary inductor is formed by sections of the firstset of bond wires extending between the first and second segmentedcapacitor arrays, and wherein the secondary inductor is formed bysections of the second set of bond wires extending between the first andsecond segmented capacitor arrays.
 12. The method of claim 11, whereintesting the packaged RF power transistor comprises measuring at leastone of: an input capacitance of the RF power transistor, an outputcapacitance of the RF power transistor, a capacitance at least one ofthe static capacitors in the input match network, and an inductance ofat least one of the bond wires in the input match network.
 13. Themethod of claim 11, wherein testing the packaged RF power transistorcomprises measuring an insertion phase of the packaged RF powertransistor, and wherein determining the DC bias comprises determining acapacitance value of the tuning capacitor that will shift the insertionphase closer to a nominal insertion phase.